Method to fabricate silicon chromatographic column comprising fluid ports

Patent Number: 6,699,392
Issued: 3/2/2004
Official Filing: View the Complete Patent
Abstract: A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.
Filed: 6/10/2002
Application Number: 10/167,238
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.