Bi-directional planar slide mechanism

United States Patent

6,640,452
November 4, 2003
View the Complete Patent at the US Patent & Trademark Office
A bi-directional slide mechanism. A pair of master and slave disks engages opposite sides of the platform. Rotational drivers are connected to master disks so the disks rotate eccentrically about their respective axes of rotation. Opposing slave disks are connected to master disks on opposite sides of the platform by a circuitous mechanical linkage, or are electronically synchronized together using stepper motors, to effect coordinated motion. The synchronized eccentric motion of the pairs of master/slave disks compels smooth linear motion of the platform forwards and backwards without backlash. The apparatus can be incorporated in a MEMS device.
Bieg; Lothar F. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
10/225,111
August 20, 2002
33/1M ; 33/26; 33/32.5; 33/503;
G03F 7/20 (20060101); B43L 013/00 (); G01B 005/004 ();
33/1M,503,26,32.1,32.3,32.4,32.5
FEDERALLY SPONSORED RESEARCH The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.