Apparatus to position a microelectromechanical platform

United States Patent

September 23, 2003
View the Complete Patent at the US Patent & Trademark Office
The present invention comprises a microelectromechanical positioner to achieve substantially translational positioning of a platform without rotational motion, thereby maintaining a constant angular orientation of the platform during movement. A linkage mechanism of the positioner can comprise parallelogram linkages to constrain the rotational motion of the platform. Such linkages further can comprise flexural hinges or other turning joints at the linkage pivots to eliminate the need for rubbing surfaces. A plurality of the linkage mechanisms can be used to enable translational motion of the platform with two degrees of freedom. A variety of means can be used to actuate the positioner. Independent actuation of the anchor links of the linkage mechanisms with rotary electrostatic actuators can be used to provide controlled translational movement of the platform.
Miller; Samuel Lee (Albuquerque, NM), Rodgers; Murray Steven (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
September 26, 2001
310/307 ; 310/309; 310/329;
H02N 1/00 (20060101); H03H 037/32 (); H01L 041/08 (); H02K 033/10 ();
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.