Miniature quadrupole mass spectrometer having a cold cathode ionization source

United States Patent

6,452,167
September 17, 2002
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Miniaturized Mass Spectrometer
An improved quadrupole mass spectrometer is described. The improvement lies in the substitution of the conventional hot filament electron source with a cold cathode field emitter array which in turn allows operating a small QMS at much high internal pressures then are currently achievable. By eliminating of the hot filament such problems as thermally "cracking" delicate analyte molecules, outgassing a "hot" filament, high power requirements, filament contamination by outgas species, and spurious em fields are avoid all together. In addition, the ability of produce FEAs using well-known and well developed photolithographic techniques, permits building a QMS having multiple redundancies of the ionization source at very low additional cost.
Felter; Thomas E. (Livermore, CA)
Sandia National Laboratories (Livermore, CA)
09/315,001
May 19, 1999
250/292 ; 250/423R; 250/427;
H01J 49/42 (20060101); H01J 49/34 (20060101); H01J 049/14 ();
250/427,292,423F,288,287
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in this invention.