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Apparatus and method to measure semiconductor optical absorption using microwave charge sensing

United States Patent

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September 21, 2021
View the Complete Patent at the US Patent & Trademark Office
A time-resolved microwave reflectance apparatus comprises a pulsed or modulated optical source that irradiates a semiconductor sample with an excitation pump beam, a microwave oscillator that irradiates the sample with a continuous beam of microwaves, and a microwave detector that detects the microwaves reflected by the sample. Therefore, charge detection, rather than conventional absorption measurements (that detect the loss of photons), can be used to extract the absorption coefficient and band edge of a semiconductor material.
16/ 543,891
August 19, 2019
G01N 22/02 (20060101)H01S 3/091 (20060101)H05B 6/64 (20060101)
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.