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Planar electrode arrays and fabrication methods thereof

United States Patent

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April 6, 2021
View the Complete Patent at the US Patent & Trademark Office
The present invention relates to a method of fabricating an electrode array, in which an underlying handle wafer is removed to provide a planar device having the electrode array. Also provided are wafers including a plurality of planar devices having an electrode array, as well as sensors including such an electrode array.
16/ 268,806
February 6, 2019
G01N 27/327 (20060101)B81C 1/00 (20060101)G01N 17/04 (20060101)G01N 27/416 (20060101)H05K 3/00 (20060101)
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.