Planar electrode arrays and fabrication methods thereof
| Patent Number: | 10,969,359 |
| Issued: | 4/6/2021 |
| Official Filing: | View the Complete Patent |
| Abstract: | The present invention relates to a method of fabricating an electrode array, in which an underlying handle wafer is removed to provide a planar device having the electrode array. Also provided are wafers including a plurality of planar devices having an electrode array, as well as sensors including such an electrode array. |
| Filed: | 2/6/2019 |
| Application Number: | 16/268,806 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |