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Active mechanical-environmental-thermal MEMS device for nanoscale characterization

United States Patent

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May 5, 2020
View the Complete Patent at the US Patent & Trademark Office
A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.
March 19, 2018
G01N 27/447 (20060101); G01N 3/02 (20060101); G01N 3/08 (20060101); G01N 30/60 (20060101);
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.