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Single crystal micromechanical resonator

United States Patent

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9,641,154
May 2, 2017
View the Complete Patent at the US Patent & Trademark Office
A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.
15/ 349,593
November 11, 2016
1/1
H03H 9/54 (20060101)H03H 9/205 (20060101)H03H 3/02 (20060101)H03H 9/02 (20060101)H03H 9/17 (20060101)
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.