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Evanescently coupled piezoelectric acoustic devices

United States Patent

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November 26, 2019
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An electro-acoustic device includes a plurality of suspended, piezoelectric, acoustically waveguiding membranes supported in a common plane. An input transducer coupled to one of the waveguiding membranes converts input electrical signals to traveling-wave acoustic signals. An output transducer coupled to one of the waveguiding membranes converts acoustic signals to electrical signals. At least two of the waveguiding membrane have parallel straight sections that are longer than a guided acoustic wavelength and that are mutually separated by an air gap having a width less than the guided acoustic wavelength.
September 28, 2017
H03H 9/17 (20060101); H03H 9/205 (20060101); G01H 3/06 (20060101);
ACKNOWLEDGEMENT OF GOVERNMENT SUPPORT This invention was made with Government support under Contract No. DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The Government has certain rights in the invention.