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High sensitivity single-axis MEMS accelerometer with bilateral flexures

United States Patent

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10,473,687
November 12, 2019
View the Complete Patent at the US Patent & Trademark Office
A microelectromechanical systems (MEMS) accelerometer that has high sensitivity to motion along the z axis is discussed. The device includes two symmetrical sets of bilateral, diametrically opposed high aspect ratio flexures that tether a movable proof mass to the frame of the device. The flexures are designed in such a way as to restrict movement of the proof mass along the x and y axes but readily allow motion along the z axis. More specifically, when the device experiences an acceleration along the x or y axes, the proof mass is restricted from moving because some of the bilateral, diametrically opposed flexures are in compression and others are in tension.
15/594,133
May 12, 2017
1/1;
G01P 15/125 (20060101); G01P 15/08 (20060101);
;73/514.32
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.