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Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors

United States Patent

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August 27, 2019
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A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.
October 1, 2015
B81B 7/02 (20060101); G01P 15/125 (20060101); B81B 7/00 (20060101);
GOVERNMENT RIGHTS This invention was developed under a commercialization agreement between the University of Texas El Paso at El Paso (UTEP) on behalf of The University of Texas System Board of Regents, and Sandia Corporation, manager and operator of Sandia National Laboratories for the U.S. Department of Energy under Contract No. DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The U.S. Government therefore has certain rights in this invention pursuant to Contract No. DE-AC04-94AL85000.