Licensing Opportunity Contact Form
Submission of this form should not be interpreted as an offer to license technology. All licenses are subject to negotiation and availablility of the intellectual property for licensing. This form is intended for indications of interest only.
 

Search/Browse Tech

Vertically integrated optoelectronics package for MEMS devices

GO BACK

United States Patent

To discuss licensing opportunities, fill out our Contact Form 
10,139,564
November 27, 2018
View the Complete Patent at the US Patent & Trademark Office
The present application relates to vertically integrated assemblies including a MEMS-based optomechanical architecture. In some embodiments, the assembly includes a MEMS/optoelectronic module, an emitter module, and a detector module, where these modules are vertically integrated. Methods of fabricating such assemblies are also described herein.
15/ 009,153
January 28, 2016
1/1
G02B 6/122 (20060101)H01S 5/42 (20060101)H01S 5/343 (20060101)G02B 6/42 (20060101)H01S 5/022 (20060101)G02B 6/34 (20060101)
STATEMENT OF GOVERNMENT INTEREST This application was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the application.