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Electroplated AU for conformal coating of high aspect ratio silicon structures

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United States Patent

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10,147,510
December 4, 2018
View the Complete Patent at the US Patent & Trademark Office
Large Field of View, 3D X-ray Phase Contrast Imaging System
A method for electroplating a nonmetallic grating including providing a nonmetallic grating; performing an atomic layer deposition (ALD) reaction to form a seed layer on the nonmetallic grating; and electroplating a metallic layer on the seed layer such that the metallic layer uniformly and conformally coats the nonmetallic grating. An apparatus including a silicon substrate having gratings with an aspect-ratio of at least 20:1; a atomic layer deposition (ALD) seed layer formed on the gratings; and an electroplated metallic layer formed on the seed layer, wherein the electroplated metallic layer uniformly and conformally coats the gratings.
14/ 081,342
November 15, 2013
1/1
C25D 3/48 (20060101)G21K 1/10 (20060101)
GOVERNMENT RIGHTS This invention was developed under Contract DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The U.S. Government has certain rights in this invention.