Optomechanical force sensors, cantilevers, and systems thereof
| Patent Number: | 10,031,158 |
| Issued: | 7/24/2018 |
| Official Filing: | View the Complete Patent |
| Abstract: | An optomechanical force sensor includes a substrate, a cantilevered beam anchored to the substrate, and a probe tip positioned near an end of the cantilevered beam distal to the substrate. A suspended waveguide is disposed on the cantilevered beam and is optically continuous with an input/output waveguiding structure. An optical cavity is defined within the suspended waveguide. |
| Filed: | 12/14/2016 |
| Application Number: | 15/378,900 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |