To address the current national emergency, U.S. entities may be eligible to license select Sandia intellectual property at no cost for a limited time. Learn more.

Search/Browse Tech

Optomechanical force sensors, cantilevers, and systems thereof

United States Patent

To discuss licensing opportunities, fill out our Contact Form 
10,031,158
July 24, 2018
View the Complete Patent at the US Patent & Trademark Office
An optomechanical force sensor includes a substrate, a cantilevered beam anchored to the substrate, and a probe tip positioned near an end of the cantilevered beam distal to the substrate. A suspended waveguide is disposed on the cantilevered beam and is optically continuous with an input/output waveguiding structure. An optical cavity is defined within the suspended waveguide.
15/378,900
December 14, 2016
1/1;
G01Q 60/38 (20100101);
;850/1,2,3,4,30,31,62,52,55,56
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.