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Methods for suppressing spurious modes in microresonators

United States Patent

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June 26, 2018
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The present invention relates to methods for suppressing spurious modes in microresonators. In particular embodiments, such spurious modes can be reduced by providing one or more structural components that effectively reduce the acoustic velocity in the transducer domain. Additional methods and microresonators are described herein.
August 17, 2016
H03H 9/15 (20060101); H03H 9/25 (20060101); H03H 3/007 (20060101); H03H 3/02 (20060101); H03H 3/08 (20060101); H03H 9/02 (20060101);
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.