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Precise annealing of focal plane arrays for optical detection

United States Patent

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October 17, 2017
View the Complete Patent at the US Patent & Trademark Office
Precise annealing of identified defective regions of a Focal Plane Array ("FPA") (e.g., exclusive of non-defective regions of the FPA) facilitates removal of defects from an FPA that has been hybridized and/or packaged with readout electronics. Radiation is optionally applied under operating conditions, such as under cryogenic temperatures, such that performance of an FPA can be evaluated before, during, and after annealing without requiring thermal cycling.
August 12, 2015
H01L 21/00 (20060101); H01L 27/146 (20060101); H01L 21/66 (20060101); C03B 9/41 (20060101); B23K 26/00 (20140101);
STATEMENT OF GOVERNMENTAL INTEREST This invention was developed under Contract DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The U.S. Government has certain rights in this invention.