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Method to fabricate micro and nano diamond devices

United States Patent

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April 11, 2017
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A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact.
September 18, 2014
H01L 29/16 (20060101); H01L 21/04 (20060101); H01L 29/04 (20060101); H01L 29/06 (20060101); H01L 29/66 (20060101); H01L 29/775 (20060101);
STATEMENT OF GOVERNMENT RIGHTS This invention was developed under Contract DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The U.S. Government has certain rights in this invention.