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Micropores and methods of making and using thereof

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United States Patent

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9,404,913
August 2, 2016
View the Complete Patent at the US Patent & Trademark Office
Microfluidic Devices
Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.
14/057,170
October 18, 2013
1/1;
B01L 3/00 (20060101); B81B 1/00 (20060101); C23F 1/02 (20060101); G01N 33/50 (20060101); B01F 3/08 (20060101); B01F 5/04 (20060101); B01F 13/00 (20060101); B81C 1/00 (20060101); B81B 7/00 (20060101); F15D 1/00 (20060101);
ACKNOWLEDGEMENT OF GOVERNMENT SUPPORT Employees of Sandia National Laboratories made this invention. The government has certain rights in the invention.