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Micropores and methods of making and using thereof
United States Patent
9,404,913 | |
August 2, 2016 | |
View the Complete Patent at the US Patent & Trademark Office | |
Microfluidic Devices | |
Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores. | |
14/ 057,170 | |
October 18, 2013 | |
1/1 | |
B01L 3/00 (20060101)B81B 1/00 (20060101)C23F 1/02 (20060101)G01N 33/50 (20060101)B01F 3/08 (20060101)B01F 5/04 (20060101)B01F 13/00 (20060101)B81C 1/00 (20060101)B81B 7/00 (20060101)F15D 1/00 (20060101) | |
ACKNOWLEDGEMENT OF GOVERNMENT SUPPORT Employees of Sandia National Laboratories made this invention. The government has certain rights in the invention. |