Fabrication of small-scale structures with non-planar features

United States Patent

November 17, 2015
View the Complete Patent at the US Patent & Trademark Office
Microfluidic Devices
The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.
December 13, 2011
H01Q 15/00 (20060101); H01Q 7/00 (20060101);
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with government support under Prime Contract Number DE-AC04-94AL85000 awarded by U.S. Department of Energy The government has certain rights in the invention.