| Abstract: | The fabrication of small-scale structures is disclosed. A unit-cell of a
small-scale structure with non-planar features is fabricated by forming a
membrane on a suitable material. A pattern is formed in the membrane and
a portion of the substrate underneath the membrane is removed to form a
cavity. Resonators are then directionally deposited on the wall or sides
of the cavity. The cavity may be rotated during deposition to form
closed-loop resonators. The resonators may be non-planar. The unit-cells
can be formed in a layer that includes an array of unit-cells. |