Method of fabricating low-dislocation-density epitaxially-grown films with textured surfaces

United States Patent

8,932,403
January 13, 2015
View the Complete Patent at the US Patent & Trademark Office
Microsphere Templated Gallium Nitride Growth and Liftoff
A method for forming a surface-textured single-crystal film layer by growing the film atop a layer of microparticles on a substrate and subsequently selectively etching away the microparticles to release the surface-textured single-crystal film layer from the substrate. This method is applicable to a very wide variety of substrates and films. In some embodiments, the film is an epitaxial film that has been grown in crystallographic alignment with respect to a crystalline substrate.
13/113,123
May 23, 2011
117/89; 117/90; 117/912; 117/915; 117/95;
C30B 21/02 (20060101);
;117/915,912,89,90,95
The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.