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Micropores and methods of making and using thereof

United States Patent

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November 19, 2013
View the Complete Patent at the US Patent & Trademark Office
Microscale Immune and Cell Analysis (MICA)
Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.
Sandia Corporation ( Albuquerque, NM )
12/ 812,986
January 21, 2009
216/56 216/2216/41216/83
B31D 3/00 (20060101)
ACKNOWLEDGEMENT OF GOVERNMENT SUPPORT Employees of Sandia National Laboratories made this invention. The government has certain rights in the invention.